发明名称 METHOD OF MANUFACTURING AN ELECTRONIC MULTILAYER COMPONENT
摘要 A method of manufacturing a plurality of electronic multilayer components is disclosed in which each multilayer component comprises alternately stacked electrically conductive layers and electrically insulating layers, the electrically conductive layers being electrically connected in a periodically alternate arrangement to different edges of the multilayer component. The method comprises the steps of providing a substrate which is endowed with a regular pattern of surface protrusions on one face; depositing individual multilayer components into intervening spaces delimited by the protrusions; depositing electrically conductive layers for connection to a given edge of a multilayer component, wherein each connection occurs at an angle ( theta ) of less than 90 DEG with respect to the substrate face in a direction extending towards the surface protrusion delimiting the respective edge; depositing each electrically insulating layer so as to completely cover a preceding electrically conductive layer; after deposition of the desired multilayer composition, planing the side of the substrate on which deposition occurred so as to expose edges of the electrically conductive layers; depositing a connecting body of electrically conductive material over selected groupings of the exposed edges; and separating completed individual multilayer components from one another by severing the substrate along the surface protrusions.
申请公布号 EP0767970(A2) 申请公布日期 1997.04.16
申请号 EP19960903172 申请日期 1996.03.11
申请人 PHILIPS ELECTRONICS N.V. 发明人 NELLISSEN, ANTONIUS, JOHANNES, MARIA
分类号 H01G4/33;H01G4/30;H01G4/38;H01L21/203;H01L21/301;H01L23/522;H01L41/083;H01L41/316;H01L41/338;(IPC1-7):H01L21/203 主分类号 H01G4/33
代理机构 代理人
主权项
地址