发明名称 |
METHOD OF MANUFACTURING AN ELECTRONIC MULTILAYER COMPONENT |
摘要 |
A method of manufacturing a plurality of electronic multilayer components is disclosed in which each multilayer component comprises alternately stacked electrically conductive layers and electrically insulating layers, the electrically conductive layers being electrically connected in a periodically alternate arrangement to different edges of the multilayer component. The method comprises the steps of providing a substrate which is endowed with a regular pattern of surface protrusions on one face; depositing individual multilayer components into intervening spaces delimited by the protrusions; depositing electrically conductive layers for connection to a given edge of a multilayer component, wherein each connection occurs at an angle ( theta ) of less than 90 DEG with respect to the substrate face in a direction extending towards the surface protrusion delimiting the respective edge; depositing each electrically insulating layer so as to completely cover a preceding electrically conductive layer; after deposition of the desired multilayer composition, planing the side of the substrate on which deposition occurred so as to expose edges of the electrically conductive layers; depositing a connecting body of electrically conductive material over selected groupings of the exposed edges; and separating completed individual multilayer components from one another by severing the substrate along the surface protrusions. |
申请公布号 |
EP0767970(A2) |
申请公布日期 |
1997.04.16 |
申请号 |
EP19960903172 |
申请日期 |
1996.03.11 |
申请人 |
PHILIPS ELECTRONICS N.V. |
发明人 |
NELLISSEN, ANTONIUS, JOHANNES, MARIA |
分类号 |
H01G4/33;H01G4/30;H01G4/38;H01L21/203;H01L21/301;H01L23/522;H01L41/083;H01L41/316;H01L41/338;(IPC1-7):H01L21/203 |
主分类号 |
H01G4/33 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|