Electron multiplier for scanning electron microscopes

摘要

In a scanning electron microscope (10) an electron beam B is emitted to a specimen (2). When the electron beam B strikes the specimen (2), the specimen (2) reflects the electron beam as reflected primary electrons and generates secondary electrons. Those electrons are detected by an electron detector (14), which in turn produces a reflection image of the specimen (2). An electron multiplier (1) is used for this scanning electron microscope (1). The electron multiplier (1) includes a electron reflection plate (7) which receives the electron beam B when the electron beam B passes by or passes through the specimen (2). Upon receipt of the electron beam B, the electron reflection plate (7) reflects the electron beam B as reflected primary electrons and generates secondary electrons. A microchannel plate (3) is formed with a multiplicity of channels (31) for multiplying the reflected primary electrons and the secondary electrons.