Interface apparatus for automatic test equipment

摘要

An interface between a test head portion (202) of automatic test equipment and a handling device such as a prober (204). The interface employs preloaded kinematic couplings (270, 280) between the test head and the handling device and between the probe card (228) and the test head. These couplings allow the probe card to be repeatedly positioned relative to the component in the handling device. They also reduce forces on the probe card to prevent distortion of the probe card. The interface provides separate mechanical and electrical loops such that mechanical precision is not dependant on the electrical structure. $$