SEMICONDUCTOR INTEGRATED CIRCUIT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To optimize the mixture of a semiconductor integrated circuit where a well contact in a complete loop shape and a well contact in a non-complete well shape exist and at the same time provide a method for detecting the shortage part of the well contact. SOLUTION: A well contact where at least three sides are closed including sides which are nearly parallel to the outer-periphery sides of a semiconductor chip T and are closer to the outer peripheries is formed in each of a plurality of wells W1-W4 formed on the semiconductor chip T. A virtual pattern of the well contact in closed shape is generated in a well and is compared with the pattern of an actual well contact for creating the virtual pattern and then the pattern of the actual well contact of the disagreement is detected as a shortage part.