MECHANISMUS ZUM PARALLELEN HALTEN EINER FLÄCHE UND APPARAT ZUR VERWENDUNG EINES SOLCHEN MECHANISMUS

摘要

A parallel plane holding mechanism is constructed as follows. Beams are provided on the peripheral portion of a flat plate-shaped weight member. A base plate is provided so as to face the weight member. First and second electrodes are provided on both surfaces of the weight member and the base plate to face each other. A voltage is applied between the first electrode and the second electrode so that the distance between the weight member and the base plate is controlled to move the weight member to thereby hold a reference surface of the weight member to be parallel to a predetermined reference surface.