MASK STRUCTURE BODY AND ITS MANUFACTURE, ALIGNER USING THE MASK STRUCTURE, MANUFACTURE OF DEVICE AND DEVICE MANUFACTURED BY THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a mask structure body which can be manufactured with good yield and holds high position accuracy. SOLUTION: In a mask structure body having a supporting film 2 with a mask pattern 3, a mask substrate 1 holding the film 2 and a reinforcing body 4 which reinforces the mask substrate 1, the mask substrate 1 and the reinforcing body 4 are joined by auxiliary bonding which is different from main bonding.