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发明名称
HIGH-FREQUENCY HEATING APPARATUS
摘要
申请公布号
JPH09102462(A)
申请公布日期
1997.04.15
申请号
JP19950282440
申请日期
1995.10.03
申请人
MITSUBISHI MATERIALS SHILICON CORP;MITSUBISHI MATERIALS CORP
发明人
OI HIROYUKI;SHINYASHIKI HIROSHI
分类号
C23C16/44;H01L21/205;H01L21/324;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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