发明名称 PEDESTAL UP/DOWN MOVEMENT MECHANISM
摘要 <p>PROBLEM TO BE SOLVED: To improve the degree of freedom for layout and to improve the working efficiency for maintenance by changing the up/down movement without changing a rotary speed, suppressing the generation of dust and performing transfer without damaging articles, and at the same time installing the driving mechanism of a pedestal on the side surface of a container, and arranging, for example, an exhaust system on the lower surface of the container. SOLUTION: A connecting rod 18 is connected to a pedestal 1, a crankshaft 16 is connected to the connecting rod 18, and a rotary mechanism is connected to the crankshaft 16.</p>
申请公布号 JPH09102533(A) 申请公布日期 1997.04.15
申请号 JP19950259859 申请日期 1995.10.06
申请人 KOKUSAI ELECTRIC CO LTD 发明人 TANAKA TSUTOMU;SATO SATOSHI
分类号 B23P19/00;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 B23P19/00
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