| 摘要 |
PROBLEM TO BE SOLVED: To product a low-temperature sintered quartz substrate increased in dimensional accuracy with a shortened burning time by burning a green sheet formed from a slurry containing specific quartz fine powder, a binder and a solvent in an atmosphere containing steam. SOLUTION: This low-temperature sintered quartz substrate is obtained as follows: Quartz fine powder 1 having 5-500nm average granular diameter is primary granules is mixed with a dispersion medium not dissolving the primary granules, naturally dried or forcedly dried in a drier for 6-24hr to obtain quartz fine powder 2 having 5-50nm granular diameter is secondary granules. The quartz fine powder 2 is mixed with a binder 3 and a solvent to obtain a slurry, and the resultant slurry is mixed with at least one kind of a compound selected from among NH4 OH, HCl and HNO3 , as necessary. The final slurry is applied on a carrier sheet 4 and the resultant green sheet 5 is burned in an atmosphere containing steam of 0.005-0.85atm partial pressure at 800-1200 deg.C to obtain the objective low-temperature sintered quartz substrate. |
