| 摘要 |
PROBLEM TO BE SOLVED: To realize good magnetic properties even in the form of film, by producing a composition including a predetermined composition of N and one or more of Al, Si, V, Zr Mo, Ta and B and the balance of Fe, and by specifying the crystal grain diameter and the lattice strain of a predeterminedα-Fe face in predetermined ranges of values so that the lattice strain satisfies a predetermined formula. SOLUTION: An iron-based soft magnetic material is made of 0.01-10% by weight of one or more of Al, Si, V, Zr, Mo, Ta and B, 0.01-10% by weight of N, and the balance of Fe. The material has a crystal grain diameter D within a range of 100Å<=D<=170Å, and a lattice strain S within a range of 0.1%<=S<=0.7%. The lattice strain S satisfies formula I, wherein the lattice constant of the pure ironα-Fe face (110) is represented by a (110) and the lattice constant of a thin filmα-Fe face (110) is represented by d (hkl). This iron-based soft magnetic material has a high initial permeability of 2000 or higher even in the form of film, and thus is suitable for a core material of a thin film magnetic head. If the contents of addition metals and N are not appropriate, the predetermined initial permeability cannot be obtained.
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