| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a favorable electron emitting element little in dispersion of property at low cost, by giving the liquid drops of metallic composition solution between the electrodes counterposed on both sides of the recess made on the surface of a substrate, and performing current application processing after baking by heating. SOLUTION: A recess 6 of specified dimension is made by photolithography or the like, on the surface of a high insulating substrate 1 of quartz glass or the like. Next, on both sides of this recess 6 are a pair of element electrodes 2 and 3 made in specified dimension by printing technique. In the recess 6b between these opposed electrodes are drops 22 of metallic composition solution such as palladium or the like including electron emitting material given. It is to be desired that these liquid drops 22 should be supplied, using an ink jet system or bubble jet system of liquid drop giving means 21. Hereby, the liquid reservoir 23 straddling both electrodes is made accurately in the recess 6. Next, after drying of this liquid reservoir 23, it is heated to about 300-380 deg.C for baking. Then, an electron emitter 5 is made by applying current application processing to the conductive film 4 made with this.</p> |
