| 摘要 |
PROBLEM TO BE SOLVED: To carry out electrical connection to a plurality of through-lines having terminals extended up to at least one substrate surface respectively by introducing a scale correction factor in addition to translational and rotational correction factors. SOLUTION: An artwork expression for electrical interconnection is formed on a through-line on at least one substrate surface 11a by using the specific place of a terminal. The actual places of the terminals of at least two through- lines 12 are measured, a scale correction factor is estimated by employing the actual places of the terminals of the two through-lines 12, and the actual places of terminals are estimated in residual through-lines by using the scale correction factor. The artwork expression is corrected so that electrical interconnection to the terminals is contained correctly in through-lines, which do not exist at each specific position. Electrical interconnection 42, 48 to the through- lines 12 are formed by employing a corrected artwork. |
