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发明名称
Methode und Vorrichtung zum Ätzen des Randes einer Halbleiterscheibe
摘要
申请公布号
DE69217843(D1)
申请公布日期
1997.04.10
申请号
DE19926017843
申请日期
1992.11.05
申请人
ENYA SYSTEMS LTD., KAWAGOE, SAITAMA, JP
发明人
YUKIHIKO, TERASAWA, FUSSA-SHI, TOKYO, JP;MAKOTO, HAMANO, NISHITAMA-GUN, TOKYO, JP
分类号
H01L21/00;H01L21/306;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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