Halbleiterscheibe mit dotiertem Ritzrahmen

摘要

A scribed frame (2) for a semi-conductor device is intended to make it possible to adequately position a corpustular beam. The scribed frame (2) has a higher electrical conductivity than its surroundings. The scribed frame also makes it possible to determine the sheet resistance of the implantation by measuring the high-frequency loss resistance without contacts and nondestructively. …The scribed frame can be connected to a fixed external DC potential, for example a source or drain potential, thus making it possible to avoid side gating effects. ……