发明名称 Photoresist compositions containing supercritical fluid fractionated polymeric binder resins
摘要 A photoresist composition comprising either an admixture or a reaction product of: (a) at least one photosensitive compound selected from the group consisting of a photoactive compound, photo acid generators, and mixtures thereof; and (b) at least one polymeric binder resin fractionated with a supercritical fluid.
申请公布号 EP0727711(A3) 申请公布日期 1997.04.09
申请号 EP19960300988 申请日期 1996.02.13
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 JEFFRIES, ALFRED T., III;TOUKHY, MEDHAT A.
分类号 G03F7/004;C08L61/04;C08L61/06;G03F7/023;G03F7/032;G03F7/039;H01L21/027 主分类号 G03F7/004
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