发明名称 |
Photoresist compositions containing supercritical fluid fractionated polymeric binder resins |
摘要 |
A photoresist composition comprising either an admixture or a reaction product of: (a) at least one photosensitive compound selected from the group consisting of a photoactive compound, photo acid generators, and mixtures thereof; and (b) at least one polymeric binder resin fractionated with a supercritical fluid. |
申请公布号 |
EP0727711(A3) |
申请公布日期 |
1997.04.09 |
申请号 |
EP19960300988 |
申请日期 |
1996.02.13 |
申请人 |
OCG MICROELECTRONIC MATERIALS, INC. |
发明人 |
JEFFRIES, ALFRED T., III;TOUKHY, MEDHAT A. |
分类号 |
G03F7/004;C08L61/04;C08L61/06;G03F7/023;G03F7/032;G03F7/039;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|