发明名称 |
Vibration damping apparatus |
摘要 |
<p>A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.</p> |
申请公布号 |
EP0767320(A2) |
申请公布日期 |
1997.04.09 |
申请号 |
EP19960115807 |
申请日期 |
1996.10.02 |
申请人 |
EBARA CORPORATION |
发明人 |
WATANABE, KATSUHIDE;KANEMITSU, YOICHI;HAGA, TAKAHIDE;SUZUKI, MAMORU |
分类号 |
F16F15/023;(IPC1-7):F16F15/03 |
主分类号 |
F16F15/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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