摘要 |
PROBLEM TO BE SOLVED: To perform microfabrication of a metallic plate with high precision and with ease by surely preventing dross or spatters generating in laser machining from sticking to the machined part of the metallic plate. SOLUTION: A metallic plate 9 with a film formed of casein etching resist 10, 11 is irradiated with a laser beam L by a YAG laser beam machine and formed with an opening 12 penetrated through the metallic plate 9 and the casein etching resist 10, 11. Then, a lead frame 1a is made, which consists of a product from the metallic plate 9, by stripping and removing the casein etching resist 10, 11. Since an extra laser beam energy is absorbed by the casein etching resist 10, 11, generation of dross is suppressed. In addition, spatters 13 stuck around the opening for an etching resist 9 are removed by stripping the casein etching resist 10, 11. Thus, a product from the metallic plate 9 is obtained free from dross and spatters. |