WAFER SUPPORT DEVICE FOR VACUUM DEVICE,申请号JP19950252519-传众专利搜索

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发明名称	WAFER SUPPORT DEVICE FOR VACUUM DEVICE
摘要
申请公布号	JPH0997583(A)	申请公布日期	1997.04.08
申请号	JP19950252519	申请日期	1995.09.29
申请人	HORON:KK	发明人	OKABE HARUYUKI
分类号	H01J37/20;(IPC1-7):H01J37/20	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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