Method of making fuse with non-corrosive termination of corrosive fuse material

摘要

A fuse for a semiconductor integrated circuit is provided wherein a strip of corrosive material (82), such as aluminum, has one end thereof connected to a conductive strip (84) of a non-corrosive material and the other end thereof connected to a strip (94) of non-corrosive conductive material. The one end of the conductive strip (82) connected to the conductive strip (84) is connected through a contact (88). Similarly, the other end of the strip (82) is connected through a contact (96) to the non-corrosive conductive strip (94). The strips 84 and 94 provide a barrier to corrosion. This occurs whenever a break (104) is formed in the fuse to expose the ends of the fuse (82) at the break to a corrosive atmosphere. Alternatively, the fuse could be connected to corrosive underlying layers with contacts (118) and (124) of non-corrosive material such as a polysilicon or a polyside, or the active region of the substrate itself.