COATING FILM EXCELLENT IN CORROSION RESISTANCES TO HALOGEN GAS AND HALOGEN PLASMA, AND LAMINATED STRUCTURE FORMED WITH THE COATING FILM

摘要

PROBLEM TO BE SOLVED: To produce a coating film capable of showing excellent corrosion resistances to halogen gases and halogen plasma at all times and to produce a laminated structure. SOLUTION: This is an Al oxide thin film formable on the face to be the inside of a chamber of a window material made of transparent ceramics such as molten quartz glass or on the other various substrates. It is the one showing denseness in such a manner that the content of Ar contained as impurities is regulated to 0.001 to 5atm% or that the number of the parts recognized as ruggedness appeared on the surface by phosphoric acid series etching is regulated to >=100 pieces on the average in the field of 30×50μm (SEM: 2,000 times). Moreover, for showing the above characteristics, preferably the Al oxide is substantially composed of amorphous one.