Methods for forming a contoured regulator seat

摘要

A method for forming a contoured regulator seat in the substrate of a fluid flow regulator having a membrane with an elastic flexure. The method may involve the steps of deflecting the flexure into the substrate to form the contoured regulator seat while the substrate is in a first, soft condition; continuing that deflection until the substrate is in a second, hard condition; and then ceasing that deflection. The method may include the steps of micromachining a regulator channel into the substrate prior to performing the deflecting step, and then deflecting the flexure into the regulator channel during the deflecting step. The method may also include such steps as installing forming means for restraining a non-regulator seat portion of the substrate during the deflecting step; providing forming relief means for permitting displaced substrate material to exit from the forming means during the deflecting step; and/or providing stencil means for securing the membrane's mounting portion to the substrate during the deflecting step.