发明名称 Illuminating optical apparatus for uniformly illuminating a reticle
摘要 An illuminating optical apparatus comprises a light source providing a light beam; a rotationally symmetrical mirror having an aperture of a predetermined shape; a collimating optical system for converting the light beam, coming from the light source and condensed by the rotationally symmetrical mirror, into a substantially parallel light beam; a multiple light source forming device for forming plural secondary light source by said substantially parallel light beam; and a condenser optical system for condensing the light beam from the multiple light source forming device, thereby uniformly illuminating an object of illumination. The collimating optical system is adapted to form an image of the reflecting surface of the rotationally symmetrical mirror on a predetermined plane of the multiple light source forming device.
申请公布号 US5619376(A) 申请公布日期 1997.04.08
申请号 US19950439773 申请日期 1995.05.12
申请人 NIKON CORPORATION 发明人 KUDO, YUJI
分类号 G03B27/32;F21S8/00;F21V13/04;G02B27/30;G03B27/54;G03F7/20;H01L21/027;(IPC1-7):G02B27/10;F21V29/00 主分类号 G03B27/32
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