摘要 |
<p>PROBLEM TO BE SOLVED: To provide a forming and activation method for uniforming the electron emitting characteristic of each element in an electron source having a number of surface conductive type emitting elements matrix-wired thereon. SOLUTION: A control device 3 performs the following control in the forming and current-carrying activation of an electron source 10. Terminals DX1 -DXm are successively selected by a pulse generating power source and control switch circuit 8, and a current-carrying forming is performed with the element group connected to a row directional wiring as a unit. For each element subjected to the current-carrying forming, terminals DY1 -DYn are successively selected by a pulse generating power source and control switch circuit 7, and a current- carrying activation is performed with the element group connected to a line directional wiring as a unit. The current-carrying activation every line is executed while the discharge current from the electron source 10 is monitored by an ammeter 116, and performed until it reaches a saturated current.</p> |