| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control method for a drying furnace to set a drying temperature according to the fluctuation of humidity in a furnace and variation of a film thickness and adjust an amount of the moisture content of resist, applied on a work, at a constant value. SOLUTION: In a drying furnace 1, a humidity sensor 11 and a temperature detecting sensor 15 are arranged at each of zones A, B, C, and D. Based on detecting humidity, a furnace set temperature is controlled, further, a resist film thickness detecting sensor 13 is arranged, and based on a detecting film thickness, the furnace set temperature is regulated. This constitution prevents an influence from being exercised thereby even when the fluctuation of humidity in drying furnace and variation of a resist film thickness occur, and adjusts the moisture content of resist coated with a work at a constant value. |
