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发明名称
SPIN DRYING DEVICE
摘要
申请公布号
JPH0997780(A)
申请公布日期
1997.04.08
申请号
JP19950253367
申请日期
1995.09.29
申请人
SHIBAURA ENG WORKS CO LTD
发明人
HIROSE HARUMICHI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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