Non-contact precision measurement system

摘要

The invention is a non-contact precision measurement system and a method of measuring using the system. The surface contour of an object is measured,utilizing non-contact components, such as lasers. A measurement unit traverses a linear positioner which is parallel to the object to be measured. Then deviations are measured from a baseline reference to determine any deviations in the positioner. The measurement unit also measures the distance between the positioner and the object to produce a distance profile which is adjusted in accordance with the deviations to determine a true surface profile. This system can also be used to measure both an upper and lower surface profile to determine a thickness or to align a plurality of objects in parallel.