| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact sensor device for simultaneously detecting a plurality of physical quantities. SOLUTION: The sensor device includes a vibrator 1 and an exciting device 2 for applying a high-frequency vibration to the vibrator 1. The vibrator 1 consists of a vibration part 11, a fixed part 12 which is fixed to the exciting device 2, and an elastic deformation part 13 for connecting them. The vibration part 11 is of asymmetrical shape to Z axis and a hygroscopic thin film 14 is formed on the surface. Therefore, the vibrator 1 has two resonance vibration modes, namely a bending deformation mode (θB direction) and torsion deformation mode (θT direction). Temperature change is detected from the change in the resonance frequency of the torsion deformation mode, the moisture change is detected from the change in the resonance frequency of the bending deformation mode, and pressure change is detected from the change in the vibration amplitude of resonance vibration. |
