| 摘要 |
PROBLEM TO BE SOLVED: To assure higher charging speed and high stability of output voltage without overshooting and hunching in a DC high voltage power supply for a capacitive load. SOLUTION: A commercial power supply 1, a rectifier circuit 3, an inverter 7, a transformer 7, and a rectifier circuit 9 are sequentially connected to generate a DC high voltage Eo to charge a series circuit of a capacitor 15 and a laser apparatus 17. A thyratron 13 is excited to give the accumulated energy of the capacitor 15 to a laser 17. A voltage detecting circuit 11 detects the DC high voltage Eo and stabilizes it with a control circuit 20. The control circuit 20 quickly charges the load to control it with higher stability with a high speed comparator 23 and an integral circuit 60. Meanwhile, an operational amplifier 25 executes the overshoot control. |
