| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an anti-static wafer cassette suitable for transporting, stocking, containing and drawing work of disc-like semiconductor wafers in which troubles caused by static electricity can be prevented during these works. SOLUTION: The anti-static wafer cassette comprises a tubular bottomed cassette body 2 for containing a large number of disc-like semiconductor wafers while stacking, and a cover body 3 having a tubular part 3a covering the outer circumference of tubular part 2b of the cassette, wherein a partially threaded part is provided between the outer face at the tubular part of cassette and the inner face at the tubular part of the cover body for mounting/demounting them at a relative rotary angle of 15-45 deg.C. The cassette gas a circular or square bottom and the cover body has a right quadrangular prism tubular section. The cassette and the cover body are made of permanent anti-static resin which is preferably transparent.</p> |
