| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to change the chamfering width measure in the longitudinal direction of the floating surfaces of a slider by feeding the floating surface in a longitudinal direction and working the surfaces while vibrating the floating surfaces in a direction orthogonal with the longitudinal direction in the state of pressing the floating surfaces onto a polishing tape. SOLUTION: A traveling table 24 is returned to an origin position set on the deep side in the plane of Fig. and the slider 7 is set in the state of directing its both floating surfaces 7a upward and placing the slider on a fixing frame 6 on a pad 5 by lowering a lifting stage 23 and thereafter, the lifting stage 23 is risen to lift the slider to a specified position. This up position is such a position where the polishing tape 8 is pressed. Both sticking plates 9a, 9b vary in the wall thickness in this state and the rigidity of the sticking plates is higher than the rigidity of the pad and, therefore, the slider 7 inclines by the prescribed chamfering angleθand sink into the pad 5. An upper base plate 11 is thereafter excited laterally by vibration exciting means 25 and the traveling table 25 is moved to the front side in the plane of Fig. simultaneously therewith. The chamfering width size in the longitudinal direction of the floating surfaces is changeable by controlling a mechanical feed direction, feed amount and feed rate.
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