PRODUCTION OF THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To prevent reduction in the electric insulating performance of an alumina layer which constitutes a gap film and to prevent breakdown in an element caused by an electric factor. SOLUTION: A lower magnetic layer 10, a gap film 12 and an upper magnetic layer 14 are formed in this order on a ceramic substrate. The gap film is formed by depositing plural layers of only alumina layers each having >=300Åthickness by sputtering. All alumina layers are formed almost uniform and equal to each other and two or three layers are preferably formed. or the gap film may be formed by forming a SiO2 layer by sputtering and then forming an alumina layer by sputtering in such a manner that the thickness of the SiO2 layer is 15 to 25% of the whole gap film thickness.