发明名称 WIRE BONDER
摘要 PROBLEM TO BE SOLVED: To change a drawing direction of an aluminum wire in a different direction without grinding the surface if an aluminum wire having a large diameter and inferior in softness is used by a method wherein a wire guide is arranged under a rod between the rod and a horn. SOLUTION: A wire 12 is inserted into a wire guide 15 and its top end part is arranged at a lower end of a rod 14. Under these conditions, the rod 14 is moved to an electrode of a semiconductor pellet 4, and the wire 12 is pushed against an electrode at a lower end of the rod 14 to activate an ultrasonic vibrator 9, and a top end of the wire 12 is connected onto the electrode. Next, a horn 7 is ascended while moving in a direction of a lead 2b to draw out the wire 12. In this intermediate position, a transfer locus of the rod 12 is cured. At this time, as the wire 12 is deviated from a lower end of the rod 14, grinding of the wire 12 is not wholly caused by the rod 14.
申请公布号 JPH0992673(A) 申请公布日期 1997.04.04
申请号 JP19950250326 申请日期 1995.09.28
申请人 NEC KANSAI LTD 发明人 KAWAI YOSHIAKI
分类号 H01L21/60 主分类号 H01L21/60
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