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经营范围
发明名称
ION BEAM IRRADIATION DEVICE
摘要
申请公布号
JPH0992190(A)
申请公布日期
1997.04.04
申请号
JP19950271885
申请日期
1995.09.25
申请人
NISSIN ELECTRIC CO LTD
发明人
SAITO YOSHINORI
分类号
H01J37/05;H01J37/09;H01J37/317;H01L21/265;(IPC1-7):H01J37/09
主分类号
H01J37/05
代理机构
代理人
主权项
地址
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