SUBSTRATE AND MASK-HOLDING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a holding member which causes less sticking of dust to a jig or the like such as a mask for patterning by using a photo-resist layer. SOLUTION: An auxiliary table 6 having a net surface is installed within a green bench 4. A supporting structure having stainless steel rod members 7 and columns 8 is mounted on the auxiliary table 6. With such an arrangement as above, it is possible to reduce influence of generation and sticking of dust to a jig or the like during a waiting time for a pattern forming step with a photo-resist.