| 摘要 |
PROBLEM TO BE SOLVED: To lessen the inconvenience, e.g. swelling of a coating at the fringe part of a substrate after removal thereof or uneven removing width, significantly. SOLUTION: When a coating formed on the surface of a substrate is removed from the fringe part thereof by feeding treating liquid, a large part of coating is removed therefrom in the first stage by feeding the treating liquid at a relatively high rate q1 for a time (t1) through a nozzle having channel of a relatively large cross-section. Subsequently, the residue is removed by feeding the treating liquid at a relatively low rate q2 for a time (t2) through a nozzle having channel of a relatively small cross-section thus removing the coating within a predetermined width at the fringe part of the substrate. |
