| 摘要 |
PROBLEM TO BE SOLVED: To obtain a medium having high corrosion resistance and durability by forming a magnetic film of specified compsn. in such a manner that the oxygen density is high in an upper layer part and in an lower layer part while an area between the upper layer part and the lower layer part has a low oxygen density. SOLUTION: An ion-assisted oblique vapor deposition device is equipped with a guide member 11, a supply roll 12 for a base body 1, a winding roll 13 of the base body 1, a shielding plate 14, a crucible 15, Fe 16, an electron gun 17, a vacuum chamber 18, and ion guns 19, 20, 21. The amt. of carbon ion supplied by the ion gun 19 and the amt. of oxygen ion supplied by the ion gun 20, 21 and directions of these ions are controlled to specified values. A Fe-C-O magnetic film is formed by using this vapor deposition device in such a manner that the oxygen density in an upper part and in a lower part of the magnetic film is made high while the oxygen density is low in the area between the upper layer part and the lower layer part. This state can be obtd. by changing the supply amt. and direction of oxygen from the ion guns 20, 21. The Fe-C-0 magnetic film is preferably formed to 1000-4000Åthickness and the incident angle of oblique vapor deposition is preferably about 45-70 deg..
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