METHOD FOR MEASURING OPERATION PARAMETER OF MEASURING DEVICE, AND MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a measuring device operation parameter, that facilitates measurement and verification of measurements, and a measuring device. SOLUTION: A control device 5 moves a subject 2 in X and Y directions by means of a drive 1 by known distances ±Δx/2 and ±Δy/2, and the position of the subject 2 moved is measured and stored by an image input device 3 and an image processor 4. The control device 5 then computes a coordinate transformation factor for transformation from a coordinate system in the image processor 4 to that in the drive 1 based on the known distances ±Δx/2 and ±Δy/2 and on the measurements stored.