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发明名称
SEMICONDUCTOR WAFER AND TEST METHOD THEREFOR
摘要
申请公布号
JPH0992697(A)
申请公布日期
1997.04.04
申请号
JP19950250607
申请日期
1995.09.28
申请人
NEC YAMAGATA LTD
发明人
YANO MINORU
分类号
G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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