| 摘要 |
PROBLEM TO BE SOLVED: To analyze the components accurately by blowing a dry gas toward the detecting section of an oxygen sensor thereby preventing adhesion of moisture thereto. SOLUTION: A predetermined quantity of cleaning liquid containing components generating oxygen, e.g. hydrogen peroxide or ozone, is fed by means of a pump 1 to a thermal decomposition means 2 through a cleaning liquid supply path A and hydrogen peroxide or ozone is decomposed into oxygen and water through a solid catalyst 2B. The oxygen gas is separated from the cleaning liquid by means of a reaction cell 3 and a buffer tank 5 and the concentration thereof is measured by means of an oxygen sensor 6. Furthermore, the ratio (% concentration) of hydrogen peroxide, ozone, etc., contained in the cleaning liquid is detected by a control means B. When an on/off solenoid valve 24 is opened by a control signal delivered from the control means B at the time of measurement, drying gas filled in a gas cylinder 21 is blown through a nozzle 23 to the detecting section 6A of sensor 6. Consequently, moisture is prevented from adhering to the detecting section 6A or it is removed therefrom thus realizing accurate measurement of components. |
