发明名称 IC HANDLER
摘要 PROBLEM TO BE SOLVED: To continuously measure a plurality of lots of IC while preventing the mixing-in of IC between the lots. SOLUTION: An IC supplying part 1 has a first feed stocker 2A for housing a first lot of IC and a second feed stocker 2B for housing a second lot of IC. An IC housing part 9 has a first classifying stocker group 10A for housing the first lot of IC and a second stocker group 10B for housing the second lot of IC. The IC housed in the first feed stocker 2A is successively measured by a measuring part 6, then carried to the first classifying stocker group 10A by an IC carrying device 8, and housed in a prescribed stocker of the first classifying stocker 10A on the basis of the measurement result. When the measurement of all the IC housed in the first feed stocker 2A is ended, the IC in the second feed stocker 2B is successively measured, carried to the second classifying stocker group 10B by the IC carrying device 8, and housed in a prescribed stocker of the second classifying stocker 10B on the basis of the measurement result.
申请公布号 JPH0989982(A) 申请公布日期 1997.04.04
申请号 JP19950251044 申请日期 1995.09.28
申请人 TOSHIBA CORP 发明人 MIYAOKA OTOTOSHI
分类号 G01R31/26;H01L21/66;H01L21/677;H01L21/68;(IPC1-7):G01R31/26 主分类号 G01R31/26
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