CHUCK CABLE AND DICER ARRANGED THEREWITH

摘要

PROBLEM TO BE SOLVED: To enhance the planarity by making a plurality of through pores in a holding member and a plurality of corresponding suction grooves in a base and composing the holding member and the base of a metal having substantially identical coefficient of linear expansion. SOLUTION: A holding member 1 is made of a round metal plate (e.g. stainless steel SUS/304) 1-2mm thick provided with a plurality of through pores 1a having diameter of 0.3mm or less. Preferably, the interval of the pores 1a is 1mm or less. The base 2 is made of the same stainless steel as the holding member 1 or a metal having substantially identical coefficient of linear expansion. The base 2 is provided with a recess 2a to be fitted with the holding member 1 and a plurality of suction grooves 2b corresponding to the pores 1a are made concentrically in the bottom thereof. The holding member 1 is secured through a bond to the recess 2a of the base 2 and integrated therewith thus forming a chuck table T1 . According to the structure, thermal strain is not generated in the holding member even if the temperature varies and the planarity can be sustained.