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发明名称
THIN FILM TRANSISTOR AND ITS MANUFACTURE
摘要
申请公布号
JPH0992839(A)
申请公布日期
1997.04.04
申请号
JP19950250604
申请日期
1995.09.28
申请人
NEC CORP
发明人
OKUMURA NOBU
分类号
H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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