| 摘要 |
PROBLEM TO BE SOLVED: To effectively eliminate CO2 in laser gas. SOLUTION: Laser gas is discharged, excited and made to optically resonate, with a discharge part 1 and a laser resonator 2, and a laser beam 3 is outputted. In laser gas containing CO, CO2 is generated due to plasma chemical reaction. Laser gas released from the discharge part 1 is cooled with a cooler 4a, and sent to the discharge part 1 again with a fan 5. CO2 is adsorbed and eliminated by interposing a CO2 eliminating part 8 in a laser gas flow path 6 introducing the laser gas. As the cooler 4a, e.g. a water cooling type cooler, which cools the gas to a normal temperature can be used. |
