发明名称 PHOTOSENSITIVE POLYIMIDO PRECURSOR COMPOSITION
摘要 PROBLEM TO BE SOLVED: To enhance the sensitivity by incorporating a polymer having specified structural units as a main component and a compound having an ethylenically unsaturated double bond and an amino and/or amido group and a specified oxime compound and an aromatic secondary or tertiary amine compound. SOLUTION: This composition contains the polymer composed mainly of the structural units each represented by formula I, the compound having an ethylenically unsaturated double bond and an amino and/or amido group, the compound represented by formula II, and the aromatic secondary or tertiary compound. In the formulae I and II, R1 is a tri- or tetra-valent organic group having >=2 carbon atoms; R2 is a divalent organic group having >=2 carbon atoms; R3 is H atom or an alkali metal atom ion or ammonium ion or a 1-30C organic group; (n) is 1 or 2; each of R4 and R5 is a l-20C organic group; R6 is an organic group having >=2C and 1-4 valences; and (m) is 1-4.
申请公布号 JPH0990627(A) 申请公布日期 1997.04.04
申请号 JP19950249491 申请日期 1995.09.27
申请人 TORAY IND INC 发明人 YOSHIMURA TOSHIO;TOMIKAWA MASAO;MIURA YASUO
分类号 G03F7/004;G03F7/027;G03F7/037;G03F7/038;H01L21/027;H01L21/312;(IPC1-7):G03F7/027 主分类号 G03F7/004
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