| 摘要 |
PROBLEM TO BE SOLVED: To obtain a medium having excellent S/N and little noise by forming an area having a high oxygen density in a middle layer part of a magnetic film having a specified compsn. SOLUTION: A PET film 1 having 10μm thickness is mounted in an ion- assisted oblique vapor deposition device and the film 1 is travelled at 2m/min travelling speed. A Mg oxide crucible 15 is filled with Fe 16, which is vaporized by using a 30-kW output electron gun 17 to deposit Fe vapor on the film 1. Methane gas is supplied to a 400-W output ion gun 19 to irradiate the Fe film on the film 1 with carbon ion. Oxygen gas is supplied to ion guns 20, 21, 22 to obtain a magnetic tape for VTR. Thereby, an Fe-C-O magnetic film is obtd. while an area having a high oxygen density is formed in the middle layer part of the Fe-C-O magnetic film by using the ion guns 20, 21, 22. Thus, the obtd. medium has excellent S/N and little noise.
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