SUBSTRATE EDGE WASHING DEVICE,申请号JP19950246137-传众专利搜索

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发明名称	SUBSTRATE EDGE WASHING DEVICE
摘要
申请公布号	JPH0992637(A)	申请公布日期	1997.04.04
申请号	JP19950246137	申请日期	1995.09.25
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	OKAMOTO TADAO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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