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经营范围
发明名称
Magnetron-Kathodenzerstäubungs-Anlage
摘要
申请公布号
DE3244691(C3)
申请公布日期
1997.04.03
申请号
DE19823244691
申请日期
1982.11.30
申请人
ANELVA CORP., TOKIO/TOKYO, JP
发明人
KOBAYASHI, HARUHIRO, ZUSHI, KANAGAWA, JP;FUNAKI, HIDEFUMI, NISHITAMA, TOKIO/TOKYO, JP;SAKURAI, TAKEHIRO, HINO, TOKIO/TOKYO, JP
分类号
H01J37/34;(IPC1-7):H01F41/18;C23C14/35
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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