发明名称 Tiegel zum Ziehen von Silizium-Einkristallen
摘要 A double-wall crucible is disclosed which is constructed by coaxially disposing a cylindrical partition wall in an outer crucible for holding a molten mass of silicon as a raw material and operated by heating the outer crucible and meanwhile supplying the raw material silicon to the gap between the outer crucible and the cylindrical partition wall and introducing the consequently produced molten mass of silicon to the interior of the cylindrical partition wall through a passage below the level of the molten mass of silicon interconnecting the outer crucible and the inner side of the cylindrical partition wall and meanwhile pulling a single crystal bar from the molten mass of silicon in the cylindrical partition wall. In this double-wall crucible, at least the cylindrical partition wall is formed of quartz glass having a hydroxyl group (OH group) content of not more than 30 ppm. <IMAGE>
申请公布号 DE69400447(T2) 申请公布日期 1997.04.03
申请号 DE1994600447T 申请日期 1994.02.01
申请人 SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP 发明人 IINO, EIICHI, ANNAKA-SHI, GUNMA-KEN, JP;TAKANO, KIYOTAKA, ANNAKA-SHI, GUNMA-KEN, JP;FUSEGAWA, IZUMI, ANNAKA-SHI, GUNMA-KEN, JP;YAMAGISHI, HIROTOSHI, GUNMA-KEN, JP
分类号 C30B15/02;C30B15/12;C30B29/06;(IPC1-7):C30B15/10 主分类号 C30B15/02
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