SILICON MICROCHANNEL OPTICAL FLOW CYTOMETER

摘要

The present invention provides a flow cytometer made of two components: a flow cytometer optical head and a disposable flow module. The flow module utilizes a V-groove flow channel micromachined in a silicon wafer. The optical head comprises a laser to provide an illuminating beam and small and large angle photodetectors. Anisotropically etched facets of the V-groove reflect the illuminating beam. Small angle scattered light is also reflected by the V-groove wall and is collected by the small angle photodetector. Large angle scattered light and fluorescent light can exit the channel without reflection and are collected by the large angle photodetector. In addition, fluorescent light can be back-reflected by the V-groove, which enhances the collection efficiency. This invention further includes a method of analyzing a particle-containing fluid and a method of measuring the velocity of a particle in a fluid flow.