Substrate handling and transporting appts.

摘要

A substrate gripping, holding and/or transporting appts. (1) has an entry station (3) and a row or circle of processing stations (4-9), to which a substrate (2) is advanced by a turntable (12) or a transporter, with gripper elements (24) mounted on gripper arms (13), and then delivered to one or more set down stations (14), several gripper arms (13) being horizontally and/or vertically adjustable by the turntable (12). The novelty is that (a) some gripper elements (24) are adjustable together in the horizontal and/or vertical direction by means of the turntable (12); and (b) at least one gripper arm (13') is adjustable in at least one of the movement directions independently of the other gripper arms (13).